ResiScope II Electrical Characterization

Electrical characterization AFM

 

ResiScopeResiScope II – Electrical characterization

The ResiScope II is a unique system able to measure Resistance over 10 decades with a high sensitivity and resolution. It can be combined with several dynamic modes as MFM/EFM (AC/MAC mode) or KFM single‐pass (AC/MAC III) providing several sample characterization on the same scan area.

The measurement is made by applying a DC bias between the sample and a conductive AFM probe (tip at virtual ground). The tip is scanning in contact mode using the laser deflection for the AFM feedback . As an independent measurement, the ResiScope II measures the sample resistance through the High Performance Amplifier (HPA).

 

ResiScope Mode

 

What’s a ResiScope ?

A dual measurement system :

  • Resistance measurement
  • Current measurement (& IV spectroscopy)
  • Compatible with Oscillating mode (Tapping / AC mode )
  • Compatible with EFM/MFM or Single-pass KFM
  • Resistance 102 ohms to 1012 ohms (10 decades dynamic)
  • Output information : R, Log R, Current & I/V Spectroscopy

Applications:

  • Photovoltaic
  • Semiconductors
  • Oxide characterization
  • All conductive characterization

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Principle

ResiScope Principle

 

Applications

Photovoltaic:

Organic Solar Cell sample – 5µm scan


Semiconductor :

SRAM memory – 50µm scan


RESISCOPE  / AC mode / KFM

Allow first AC mode imaging / KFM single-pass and Resiscope measurement on the same scan area.


Oxyde characterization:

Local Oxydation Nanolithography (LON) – 5µm scan

LON patterns obtained on a 10nm thick titanium layer deposited onto alumina substrate. The resistance value inside the closed patterns shows in which experimental conditions  the oxydation of the full thickness of the film is achieved. Courtesy of A. Perez – ICMAB / CSIC – Barcelona (Spain).

 

Software

  • Easy to use
  • Automatic mode selection
  • Configurable outputs
  • Selectable output scale : R | Log R | Current

Specifications

Resistance range10² Ω to 10^12 Ω
Current range (ResiScope mode)50 fA to 1 mA
AFM compatibilityCSInstruments : Nano-Observer
UHV : please contact us
Compatible AFM mode Contact / Tapping / AC mode EFM / MFM / KFM single-pass
Operating Environment Windows® XP. 7, 8, 10, SP3 Framework DotNet 3.5 SP1
One USB port available
Power SupplyAC 100‐240V 47‐63Hz, 1A The appliance must be properly grounded.
Weight (net)2kg

 

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