Soft ResiScope

True Quantitative Resistance/ Current Measurements with Intermittent Contact for soft materials

Soft ResiScope : AFM electrical characterization on soft sample

Soft ResiScope, VO2 sample, 10µm, Topography and resistance signals

True quantitative resistance/ current measurements

The soft resiscope allows to measure resistance and current on fragile conductive samples. The specific vertical movement applied to the tip in Soft Resiscope mode optimizes the electrical measurement at the time of contact and preserves the tip and the sample. Unlike other oscillating techniques available on the market, the Soft Resiscope measures current / resistance at constant force during the cycle. The electrical measurements are then comparable to those made in AFM contact mode but with the advantage of being able to measure fragile samples.

Benefits :

 Unique Technology
 NO Friction
 Constant Force = Quantitative Electrical Measurements

Fragile & soft conductive samples
Resistance / Current
From 10² to 10^12 ohms

Non-destructive methode

Soft ResiScope Mode VS Oscillating/Contact modes

This non-destructive new method «soft ResiScope» was compared with conventional oscillating mode on fragile sample (polymer blend). The results were totally equivalent. This figure shows the first few lines of the scan measured in oscillating mode and the other part measuring by soft ResiScope mode. We can also notice the surface damaged by the previous scan made in contact mode (blue square), the surface was scratched by the tip.

Areas of a soft sample (polymer blend) measured in contact mode (blue area), then oscillating mode (green area), and finally in «Soft ResiScope» mode (red area).

Soft & Standard ResiScope Modes

Quantitative resistance/current measurements have been validated by study and open new perspectives for electrical characterization on all kind of samples and mostly soft samples

The following image demonstrates the quantitative measurements with Soft ResiScope. The comparison was made between contact mode ResiScope measurements and Soft ResiScope mode on standard electrical sample like SRAM. The result does not show any differences between contact mode and Soft ResiScope mode on topography and resistance signals. Morever the cross section show identical results between Standard ResiScope and Soft ResiScope modes.

Comparison between the Resiscope and Soft Resiscope modes, on VO2 sample, 10 µm, topography and resistance signals. The first lines performed in ResiScope mode followed by Soft ResiScope mode (activated with the Yes button) show an identical result in terms of lateral resolution and quantitative measurement

Red line : Soft ResiScope, Intermittent Mode, Blue line : Standard ResiScope, Contact Mode

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