ResiScope mode

ResiscopeTM mode is a mode of contact AFM. A conductive tip saves changes in current and resistance on a wide range with an external amplifier. Curves of current / voltage can be conducted at various locations on the sample. Resistance and conductivity over to 10 decades


 Material Science
 Electronic material


Resistance over 10 decades

ResiScope mode is a unique AFM mode able to measure resistance over 10 decades with a high sensitivity and resolution. It can be combined with several dynamic modes as MFM/EFM (AC/MAC mode) or KFM single‐pass (AC/MAC III) providing several sample characterization on the same scan area.


 Resistance measurement
 Current measurement (& IV spectroscopy)
 Compatible with Oscillating mode (Tapping / AC mode )
 Compatible with EFM/MFM or Single-pass KFM
 Resistance 102 ohms to 1012 ohms (10 decades dynamic)
 Output information : R, Log R, Current & I/V Spectroscopy

Transistor, ResiScope mode, 1.5µm
sRAM, ResiScope mode, 50µm
Local Oxidation Nanolithography, ResiScope mode, 5µm
resiscope large dynamic
Dabos Angers 10µm resiscope Resistance
Luis Vazquez Madrid 60µm Resiscope Resistance
SBS 3µm
stainless steel resiscope mode 1µm
More informations

ResiScope II system

AFM electrical characterization over 10 decades

Soft ResiScope module

AFM electrical characterization on soft sample

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